Indirect identification and compensation of lateral scanner resonances in atomic force microscopes
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In the present article we describe a new setup for an atomic force microscope in the beetle-type geometry. The microscope consists of a compact head standing on three piezo legs with a fourth central piezo carrying the cantilever tip. We use the laser beam ...
We report on the first successful operation of a scanning force microscope using microfabricated capacitive force sensors. The sensors, which are made from single crystal silicon on insulator wafers, consist of a cantilever spring with integrated tip at th ...