SMD pressure and flow sensor for compressed air in LTCC technology with integrated electronics

We propose an SMD (surface mount device) sensor in LTCC (low-temperature co-fired ceramic) technology specially designed for standard industrial compressed air. It combines the measurement of pressure, flow, and temperature, with its integrated signal conditioning electronics. Such a sensor can be mounted on an integrated electro-fluidic platform like a standard component using surface mount technology, obviating the need for both wires and tubes.