SMD pressure and flow sensor for compressed air in LTCC technology with integrated electronics

Nicolas Craquelin, Thomas Maeder, Peter Ryser
Elsevier, 2009
Article de conférence

We propose an SMD (surface mount device) sensor in LTCC (low-temperature co-fired ceramic) technology specially designed for standard industrial compressed air. It combines the measurement of pressure, flow, and temperature, with its integrated signal conditioning electronics. Such a sensor can be mounted on an integrated electro-fluidic platform like a standard component using surface mount technology, obviating the need for both wires and tubes.

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Nicolas Craquelin, Thomas Maeder, Peter Ryser
Elsevier, 2009
Article de conférence

Résumé

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https://infoscience.epfl.ch/record/173911?ln=fr

À propos de ce résultat

Concepts associés (9)

Concepts associés

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Publications associées (11)

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SMD pressure and flow sensors for industrial compressed air in LTCC technology

Grégoire Boutinard Rouelle, Yannick Fournier, Thomas Maeder, Peter Ryser

In this work, we propose an SMD (surface mount device) pressure sensor in LTCC technology specially designed for standard industrial compressed air. It combines the measurement of pressure and temperature, with its integrated signal conditioning electronics for linearization, adjustment and temperature compensation. For the first time, such a sensor can be mounted on an integrated electro-fluidic platform like a standard component using surface mount technology, obviating the need for both wires and tubes. Manufacturing of the SMD sensor is described, as well as its performance and limitations. Furthermore, a proposal for an anemometric flow sensor is described. The heating / sensing elements of the sensor consist of PTC co- fired resistors suspended on bridges across the fluidic channel; different geometric and processing variants have been manufactured for tests. In the future, we intend to integrate this flow measurement function and corresponding electronics to the pressure sensor, resulting in an all-in-one integrated industrial compressed air flow –pressure – temperature sensor.

2009

Chargement

SMD pressure and flow sensor for compressed air in LTCC technology with integrated electronics

Jean-Bastien Coma, Nicolas Craquelin, Yannick Fournier, Thomas Maeder, Peter Ryser

In this work, we present an integrated flow / pressure / temperature multisensor in LTCC (low- temperature co-fired ceramic) technology designed for diagnostics monitoring of standard industrial compressed air circuits and devices, such as valves and actuators. The pressure sensor is based on a membrane carrying a thick-film piezoresistive Wheatstone bridge. Flow is sensed using the constant- temperature anemometric principle, with the sensing thermistors placed in a fluidics channel, which also comprises similar thermistors for temperature sensing. All three sensors are integrated into a single surface-solderable LTCC unit, with the solder fulfilling the roles of mechanical fastening, electrical connectivity and fluidic sealing. In this work, the flow-sensing part is demonstrated, and possible improvements in efficiency outlined. Key words: multisensors, flow, pressure, temperature, LTCC

2010

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Integrated LTCC pressure / flow / temperature multisensor for compressed air diagnostics

Grégoire Boutinard Rouelle, Nicolas Craquelin, Yannick Fournier, Thomas Maeder, Peter Ryser

We present a multisensor designed for industrial compressed air diagnostics and combining the measurement of pressure, flow, and temperature, integrated with the corresponding signal conditioning electronics in a single low-temperature co-fired ceramic (LTCC) package. The developed sensor may be soldered onto an integrated electro-fluidic platform by using standard surface mount device (SMD) technology, e.g., as a standard electronic component would be on a printed circuit board, obviating the need for both wires and tubes and thus paving the road towards low-cost integrated electro-fluidic systems. Several performance aspects of this device are presented and discussed, together with electronics design issues. Keywords: LTCC; integrated multisensor; pressure; flow; temperature; SMD mounting

2010

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