A glass-based, high density microelectrode array (MEA) with integrated CMOS amplification
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A new fully integrated 2D micro-fluxgate magnetometer is presented. This magnetometer is integrated in a standard CMOS process and uses a ferromagnetic core integrated on the chip by a photolithographic post-process compatible with the integrated circuit t ...
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A new fully integrated 2D micro-fluxgate magnetometer is presented. This magnetometer is integrated in a standard CMOS process and uses a ferromagnetic core integrated on the chip by a photolithographic post process compatible to the integrated circuit tec ...
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The paper presents an inductive proximity sensor with fully integrated electronics. The sensor with the compact hybrid configuration is composed of a sensing flat coil and an integrated electronic interface. The sensor exhibits a longitudinal resolution of ...
Planar micromachined spiral inductive structures have applications in many areas such as microelectronics components (filters, low-power components, etc), or such as sensors (proximity sensors) and actuators (electromagnetic micromotors, micropumps, micror ...