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Three-dimensional polymeric microtiles for optically-tracked fluidic self-assembly

Publications associées (34)

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The fabrication of metallic nanostructures on stretchable substrates enables specific applications that exploit the combination of the nano-scale phenomena and the mechanical tunability of the physical dimensions of the nanostructures. Due to the large dif ...

EPFL2022

A new versatile hybrid MEMS technology for high sensitivity, fluid proof sensing applications.

Matthias Neuenschwander

The field of micro electromechanical systems (MEMS) evolved from the microelectronic industry and the technologies developed to fabricate integrated circuits. As a result, MEMS are commonly fabricated on silicon wafers. The development of MEMS has been dri ...

EPFL2022

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InSb has the smallest bandgap and highest electron mobility among III-V semiconductors and is widely used for photodetectors and high-frequency electronic applications. Integration of InSb directly on Si would drastically reduce the fabrication cost and en ...

2021

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Semiconductor nanowires (NWs) have been investigated for decades, but their application into commercial products is still difficult to achieve, with triggering causes related to the fabrication cost and structure complexity. Dopant control at the nanoscale ...

2021

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Zipping electrostatic actuators operate by bending flexible electrodes using electrostatic forces. This principle allows the use of a wide range of dielectric and conductive materials. Additive Manufacturing (AM) techniques can be used to fabricate these a ...

SPIE-INT SOC OPTICAL ENGINEERING2021

The past two decades have witnessed the explosion of activities in the field of surface enhanced Raman spectroscopy (SERS). SERS platforms employ nano-structures that excite plasmonic modes with large local electromagnetic fields localized within small gap ...

SPRINGER2020

Self-assembly of nanostructured glass metasurfaces via templated fluid instabilities

Hatice Altug, Fabien Sorin, Wei Yan, Filiz Yesilköy, Alexis Gérald Page, Yunpeng Qu, Dang Tùng Nguyen, Louis Marie Philippe Martin-Monier, Arthur Le Bris, Kuan-Ting Ho

Modern devices require the tuning of the size, shape and spatial arrangement of nano-objects and their assemblies with nanometre-scale precision, over large-area and sometimes soft substrates. Such stringent requirements are beyond the reach of conventiona ...

NATURE PUBLISHING GROUP2019

Large-scale fabrication of flexible solid-state reference electrodes

Hubert Girault, Kumar Varoon Agrawal, Milica Jovic, Luis Francisco Villalobos Vazquez de la Parra

A new approach for large-scale fabrication of miniaturized, reliable and planar solid-state reference electrodes on flexible substrates is presented. Inkjet printing technique was used for the fabrication of conductive path and silver patterns that were ch ...

2019

Fabrication of 2d Material Based Resonators

Tom Larsen, An Tran

Improvements in manufacturing processes inspired by the semiconductor integrated circuit industry have seen a sharp reduction in dimensions of microelectromechanical systems (MEMS), leading to the emergence of its submicron counterpart – nanoelectromechani ...

2017

Femtosecond laser assisted 3-dimensional freeform fabrication of metal microstructures in fused silica

Andreas Mortensen, Yves Bellouard, Raphaël Charvet, Fatmah Ebrahim, Cyril Dénéréaz

Femtosecond laser exposure of fused silica combined with chemical etching has opened up new opportunities for three-dimensional freeform processing of micro-structures that can form complex micro-devices of silica, integrating optical, mechanical and/or fl ...

Spie-Int Soc Optical Engineering2017