Properties of Piezoelectric Pzt Thin Films for Microactuator Applications
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Pb(Zr, Ti)O-3 (PZT) is an interesting material for bulk acoustic wave resonator applications due to its high electromechanical coupling constant, which would enable fabrication of large bandwidth frequency filters. The major challenge of the PZT solid solu ...
This paper focuses on the fabrication and evaluation of vibration energy harvesting devices by utilizing an epitaxial Pb(Zr0.2Ti0.8)O-3 (PZT) thin film. The high quality of the c-axis oriented PZT layer results in a high piezoelectric coefficient and a low ...
The dielectric properties of undoped, Nb-, and Fe-doped Pb(Zr,Ti)O3 ceramics with composition near morphotropic phase boundary were investigated in the frequency range from 1 MHz to 20.2 GHz at room temperature. Temperature dependences of dielectric permit ...
A tunable membrane-type thin film bulk acoustic wave resonator (TFBAR) based on a Ba0.3Sr0.7TiO3(BST) thin film has been fabricated. The resonance and antiresonance frequencies of the device can be altered by applying a dc bias: both shift down with increa ...
The effect of mechanical loading on the tuning performance of a tunable Thin Film Bulk Acoustic Wave Resonator (TFBAR) based on a Ba0.3Sr0.7TiO3 (BST) thin film has been investigated experimentally and theoretically. A membrane-type TFBAR was fabricated by ...
In this study, ceramic samples of lead zirconate titanate Pb(Zr0.42Ti0.58)O3 (PZT 42/58) doped with Fe (hard) and Nb (soft) were studied by Raman, infrared (IR) and THz spectroscopy in the temperature range from 900 to 20 K. From the evaluation of the IR a ...
Thin Film Bulk Acoustic Wave Resonators (TFBARs) had been developed a decade ago and since then were implemented extensively in mobile communications devices. The "heart" of a TFBAR consists of a piezoelectric film that operates as an acousto-electric tran ...
Radio frequency (RF) filters based on bulk acoustic wave resonances in piezoelectric thin films have become indispensable components in mobile communications. The currently used material, AlN, exhibits many excellent properties for this purpose. However, i ...
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