Properties of Piezoelectric Pzt Thin Films for Microactuator Applications
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Pb(Zr-x,Ti1-x)O-3 thin films of homogeneous composition were synthesized by means of a modified sol-gel route on Pt(111)/TiOx/SiO2/Si substrates. The usually observed gradient in B-site composition could be reduced from +/- 12 to +/- 12.5 at% amplitude in ...
The dielectric response of ferroelectric-dielectric composites is theoretically addressed. Dielectric permittivity, tunability (relative change of the permittivity driven by dc electric field), and loss tangent are evaluated for various composite models. T ...
Piezoelectric materials are used in a wide range of applications, with lead zirconate titanate (PZT) ceramics being the dominant family of materials, due to high piezoelectric coefficients, dielectric permittivity and coupling factors. The high properties ...
In the past two decades, the fact that “small is different” has been established for a wide variety of phenomena, including electrical, optical, magnetic, and mechanical behavior of materials. However, one largely untapped but potentially very important ar ...
The reliability and charging/discharging dynamics of wideband (1.5-14GHz) phase shifters made of MEMS capacitive switches using Aluminum Nitride (AlN) as dielectric are originally reported. Phase shifter lifetimes exceeding 109 cycles are achieved in hot-c ...
The production of lead zirconate titanate (PZT) with a variation in Zr and Ti ratios using a hydrothermal method has been attempted. We show that when reactions are conducted at 160 degrees C, for 4 h, the phase of PZT produced is independent of the initia ...
Piezoelectric responses of barium titanate single crystals are investigated along the [720] and [111] directions, respectively, in order to verify the ultrahigh piezoelectric constant (2000 pC/N) reported in a previous study [Appl. Phys. Lett. 86, 012905 ( ...
Piezoelectric micro-electro-mechanical systems (MEMS) are finding an increased interest for applications requiring high frequency operation and high mechanical quality. The aim of this work was to improve piezoelectric MEMS along two main research directio ...
In bulk ferroelectric ceramics, extrinsic contributions associated with motion of domain walls and phase boundaries are a significant component of the measured dielectric and piezoelectric response. In thin films, the small grain sizes, substantial residua ...
We report on the experimental investigation of a high-frequency (1 MHz-1.8 GHz) dielectric dispersion in unpoled and poled Pb(Zr,Ti)O-3 ceramics. Two overlapping loss peaks could be revealed in the dielectric spectrum. The linear dependence between the low ...
