Thin piezoelectric films for micro-electromechanical components
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Radio frequency (RF) filters based on bulk acoustic wave resonances in piezoelectric thin films have become indispensable components in mobile communications. The currently used material, AlN, exhibits many excellent properties for this purpose. However, i ...
Sol-gel process has successfully been applied for the deposition of porous PbZrxTi1-xO3 (x = 0.45, 0.15) thin films on platinized silicon wafers. Addition of a polymer as a volatile phase to the precursor sol prior to spin coating has been proved an excell ...
Pb(Zr-x, Ti1-x)O-3 (PZT) piezoelectric thin films are of major interest in MEMS technology for their ability to provide electro-mechanical coupling. In this work, the effective transverse piezoelectric coefficient e(31,f) of sol-gel processed films was inv ...
Fabrication and characterization of ZnO thin film piezoelectric sensors on a polyimide membrane is presented in this paper. As a test device a differential pressure liquid flow sensor has been fabricated. We discuss new material combinations for the fabric ...
Thin Film Bulk Acoustic Wave Resonators (TFBARs) had been developed a decade ago and since then were implemented extensively in mobile communications devices. The "heart" of a TFBAR consists of a piezoelectric film that operates as an acousto-electric tran ...
Piezoelectric micro-electro-mechanical systems (MEMS) are finding an increased interest for applications requiring high frequency operation and high mechanical quality. The aim of this work was to improve piezoelectric MEMS along two main research directio ...
Micro-system for active vibratory insulation, characterised in that it comprises a stand which includes a frame (1) and at least two beams (2a, 2b) which interlock and carry or are intended to carry an element requiring stabilisation (3), said beams (2a, 2 ...
A phenomenological approach is proposed describing both nonlinearity and frequency dispersion in dielectric and piezoelectric properties of lead zirconate titanate, Pb(Zr,Ti)O-3 (PZT), thin films and ceramics. The approach couples the frequency dependent r ...
PbTiO3 thin films were prepared from alkoxide solution precursors and crystallized onto Pt/TiO2/SiO2/Si substrates. Microscopy observations revealed that the complexity of the domain walls structure decreased with the grain size. Dielectric, electrostricti ...
The printing of lead zirconate titanate (PZT, Pb(Zr,Ti)O-3) piezoelectric thick films on silicon substrates is being studied for potential use as microactuators, microsensors, and micro.. transducers. A fundamental challenge in the fabrication of useful PZ ...
