Publication

Implementing MEMS technology for soft, (bio)electronics interfaces.

Publications associées (41)

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Microrobotics: Methods and Applications

Yves Bellouard

From conception to realization, Microrobotics: Methods and Applications covers all aspects of miniaturized systems that physically interact and manipulate objects at the microscale. It provides a solid understanding of this multidisciplinary field, which c ...

CRC Press2009

Structuration of thin bridge and cantilever structures in thick-film technology using mineral sacrificial materials

Peter Ryser, Thomas Maeder, Caroline Jacq, Yannick Sébastien Fournier, Wassim Hraiz

Thick-film and LTCC (Low Temperature Cofired Ceramic) technologies find increasing use in meso-scale sensors, actuators and related devices that feature excellent dimensional, thermal and chemical stability at moderate cost. While several materials and pro ...

IMAPS2009

Multi-gate vibrating-body field effect transistor (VB-FETs)

Mihai Adrian Ionescu, Dimitrios Tsamados, Daniel Grogg, Marco Mazza

This paper reports on the design, fabrication and detailed characteristics of multi-gate vibrating-body field effect transistors (VB-FETs). Double-gate and four-gate VB-FETs with resonance frequencies of 2 MHz and 71 MHz, respectively, are successfully dem ...

2008

Fabrication of a Millinewton Force Sensor Using Low Temperature Co-fired Ceramic (LTCC) Technology

Peter Ryser, Thomas Maeder, Hansu Birol, Ingo Nadzeyka

This study is aimed at outlining the fabrication of a novel piezoresistive force sensor using LTCC technology, which operates at millinewton range, yet is compatible with low cost thick-film fabrication process. Mechanical and electrical characterization o ...

Elsevier2007

Nanostencil lithography for nanowire patterning

Jürgen Brugger, Marc Antonius Friedrich van den Boogaart

Stencil lithography is an innovative method for patterning that has a great flexibility from many points of view. It is based on shadow mask evaporation using thin silicon nitride membranes that allow the patterning of sub-100 nm features up to 100 μm in a ...

2006

Using plastics or dyes like molecular semiconductors to make optoelectronic devices at low cost is a project in industry that is of great interest to the "Information Community" of this beginning of the 21st century. Some applications of this technology ha ...

EPFL2006

The present doctoral thesis aims to contribute to the field of organic semiconductor physics and technology, both of which have become fast growing disciplines. Two technological applications are emerging from these research efforts: Organic light-emitting ...

EPFL2006

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A microscopic four-point probe (u4PP) for resistivity measurements on thin films was designed and fabricated using the negative photoresist SU-8 as base material. The device consists of four microscopic cantilevers, each of them supporting a probe tip at t ...

2005

Microscopic four-point probe based on SU-8 cantilevers

Jürgen Brugger, Giovanni Boero, Schahrazede-Lila Mouaziz, Stephan Keller

A microscopic four-point probe (micro4PP) for resistivity measurements on thin films was designed and fabricated using the negative photoresist SU-8 as base material. The device consists of four microscopic cantilevers, each of them supporting a probe tip ...

2005

A self-assembled monolayer-assisted surface microfabrication and release technique

Jürgen Brugger

This paper describes a method of thin film and MEMS processing which uses self-assembled monolayers as ultra-thin organic surface coating to enable a simple removal of microfabricated devices off the surface without wet chemical etching. A 1.5-nm thick sel ...

2001