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Parylene-Based Hollow Nanomechanical Resonators For Bioapplications

Publications associées (33)

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Reactivity of Multimetallic Thorium Nitrides Generated by Reduction of Thorium Azides

Rosario Scopelliti, Marinella Mazzanti, Fang-Che Hsueh, Luciano Barluzzi

Thorium nitrides are likely intermediates in the reported cleavage and functionalization of dinitrogen by molecular thorium complexes and are attractive compounds for the study of multiple bond formation in f-element chemistry, but only one example of thor ...

2022

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We demonstrate the generation of a supercontinuum spanning more than 1.5 octaves over the 1.2-3.7 mu m range in a silicon nitride waveguide using sub-40-fs pulses at 2.35 mu m generated by a 75 MHz Kerr-lens mode-locked Cr:ZnS laser. (C) 2019 Optical Socie ...

OPTICAL SOC AMER2019

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The self-assembly of a single layer of organic molecules on a substrate is a powerful strategy to modify surfaces and interfacial properties. Thiolates, silanes, phosphonates and carboxylates are widely used head-groups to link organic molecules to specifi ...

2019

Optical nanocavities enhance light-matter interaction due to their high quality factors (Q) and small modal volumes (V). The control of light-matter interaction lies at the heart of potential applications for integrated optical circuits, including optical ...

EPFL2018

Chip-based optical waveguides formed by a silicon nitride (Si3N4) core and a silicon dioxide (SiO2) cladding are an important platform for low loss waveguides and nonlinear optics. High Q microresonators based on this material system have become a standard ...

EPFL2018

Thin-Wall GaN/InAlN Multiple Quantum Well Tubes

Nicolas Grandjean, Jean-François Carlin, Raphaël Butté

Thin-wall tubes composed of nitride semiconductors (III-N compounds) based on GaN/InAlN multiple quantum wells (MQWs) are fabricated by metalorganic vapor-phase epitaxy in a simple and full III-N approach. The synthesis of such MQW-tubes is based on the gr ...

Amer Chemical Soc2017

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Fabrication of silicon based micro-channels is typically a complex process involving multiple steps such as lithography, bonding, thin film deposition, etching, surface migration etc. We present a method for the fabrication of microchannels . insired by 2D ...

2017

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We report on the development of electrochemical etching technology for the production of multilayer porous structures |(MPS) allowing one to fabricate Bragg reflectors on the basis of GaN bulk substrates grown by Hydride Vapor Phase Epitaxy |(HVPE). The fo ...

Spie-Int Soc Optical Engineering2017

Study of Silicon Nitride resonators for optomechanics and security applications

Tom Larsen, Alberto Barulli

In this work the design, fabrication and characterization of silicon nitride nano-mechanical resonators is presented, starting from silicon nitride thin films deposited on Si wafers according to ten different recipes. The properties of such devices will de ...

2017

Ten runs of silicon nitride LPCVD (Low Pressure Chemical Vapor Deposition) depositions were performed with a different recipe for each run. The goal of this work was to examine properties of silicon nitride and their variation with regards to the depositio ...

2015