Lithographic patterning of insulating or semiconducting solid state material in crystalline form

Luca Moreschini, Simon Karl Moser
2014
Brevet

Résumé

A method for lithographic patterning of an insulating or semiconducting solid state material in crystalline form, said method comprising a step where said material is exposed to an amount of radiation which is sufficient to change its insulating or semiconducting state into a conducting state.

Source officielle

https://infoscience.epfl.ch/record/228421?ln=fr

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Lithographic patterning of insulating or semiconducting solid state material in crystalline form

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