Three-Dimensional Nano-Acoustic Bragg Reflectors for CMOS Embedded NEMS
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We report the design, fabrication and test of piezoresistive cantilevers for intermolecular force detection in biochemical sensing. The small forces involved in molecular recognition experiments are best detected with cantilevers with small spring constant ...
We report the design, fabrication and test of piezoresistive cantilevers for intermolecular force detection in biochemical sensing. The small forces involved in molecular recognition experiments are best detected with cantilevers with small spring constant ...
We present a fully integrated Mach-Zehnder interferometer in silicon-on- insulator technology. Modulation of the index of refraction is achieved through the plasma dispersion effect resulting in a bandwidth in the 10 MHz range. A particular and innovative ...
