Enhanced piezoelectric properties of c-axis textured aluminium scandium nitride thin films with high scandium content: influence of intrinsic stress and sputtering parameters
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Three unique structure types of the vanadate-based mixed-metal oxide systems (salt)·MnII-Vv-O and (salt)·CuII-Vv-O are presented, with a focus on the role of the asym. vanadate units. Lattice parameters were obtained for (CsCl)2Mn(VO3)2, (CsBr)2Mn(VO3)2, ( ...
Highly textured PZT(111), PZT(001/100) and random PZT films have been grown on Pt and RuO2 bottom electrodes by means of an in-situ, multimagnetron reactive sputtering process with three metal targets (Pb, Zr, Ti). The orientation was varied with the botto ...
We have studied deposition by in-situ reactive sputtering of ferroelectric Pb(ZrxTi1-x)O3 (PZT) thin films on Pt and RuO2 electrodes, using temperatures in the 490-620°C range. Nucleation on the electrode was found to be of prime importance for the formati ...
We present the fabrication and characterization of hybrid SPM probes with full platinum (Pt) cantilever and tip for biological SPM experiments. In recent years, SPM has shown its value in imaging and characterizing biological samples. Classic SPM sensors f ...
Fiber optic modulators were fabricated by coating optical fibers with electrode and piezoelectric ZnO layers. The techniques of piezoelectric fiber optic modulator (PFOM) fabrication are presented, and the microstructure and crystallographic texture of the ...
Piezoelectric micro-electro-mechanical systems (MEMS) are finding an increased interest for applications requiring high frequency operation and high mechanical quality. The aim of this work was to improve piezoelectric MEMS along two main research directio ...
Polycrystalline aluminum nitride thin films were deposited onto platinum, aluminum, and titanium electrodes by reactive magnetron sputtering in the pulsed direct current mode. The films exhibited all a columnar microstructure and a c-axis texture. The buil ...
A novel two-step method was developed to prep. gold nanoparticles on boron-doped diamond (BDD) electrode. It consisted of sputter deposition of max. 15 equiv monolayers of gold, followed by a heat treatment at 400-600 Deg in air. The as-sputtered gold depo ...
The self-polarization effect is investigated in Pb(Zr,Ti)O-3 (PZT) thin films deposited by sol-gel and magnetron sputtering techniques. The effective piezoelectric coefficient of as-grown films, which is proportional to their initial polarization (self-pol ...
All-fiber optical phase modulators were fabricated by coating standard telecommunication optical fibers with thin films of piezoelectric ZnO. Piezoelectric optical fiber coatings of PbZrxTi1-xO3(PZT) were also produced, and the actuation capability necessa ...