Fabrication of 2D Material Based NEMS Resonators

2D materials such as graphene, MoS2 and phosphorene are promising candidates for resonating mechanical sensors due to excellent tunable electrical/- mechanical properties, low masses, and maximal surface to volume ratios. Mechanical resonators based on supsended graphene have been realized. - CVD graphene wet-transferred onto 10x10 mm Si/SiO2 chips with Au electrodes - Graphene patterned in O2 plasma with a resist mask - Graphene is released by etching SiO2 in BHF and critical point drying