Effective quality factor tuning mechanisms in micromechanical resonators
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The operation of the scanning near-field optical microscope based on the double-resonant montage of a fiber probe onto the tuning fork (working frequency of the latter, that is 32 kHz, coincides with the second resonance frequency of the bending oscillatio ...
SPIE-INT SOC OPTICAL ENGINEERING, PO BOX 10, BELLINGHAM, WA 98227-0010 USA2007
The design, fabrication and experimental investigation of 21MHz MEM Bulk Lateral Resonators (BLR) on 1.5 mu m Silicon-On-Insulator (SOI) Fragmented Membranes with 100nm air-gaps are reported(#). Quality factors as high as 33'000 are measured under vacuum a ...
Ieee Service Center, 445 Hoes Lane, Po Box 1331, Piscataway, Nj 08855-1331 Usa2007
High-Q, bulk acoustic wave composite resonators based on a symmetric layer sequence Of SiO2-A1N-SiO2 sandwiched between electrodes have been developed. Acoustic isolation was achieved by means of deep silicon etching to obtain membrane type TFBAR's. Three ...
Ieee Service Center, 445 Hoes Lane, Po Box 1331, Piscataway, Nj 08855-1331 Usa2007
The goal of the project is to fabricate ultra sensitive cantilevers for magnetic resonance force microscopy. Such devices have been produced using SOI wafers and a novel fabrication process combining Al encapsulation and HF-vapor release. The realized cant ...
Friction is present in almos every motion control application an effect the quality of the position, velocity or force control. This influence depends on the controls strategy itself and on the compensation algorihms that can be added to improve the contro ...
The friction force on a nanometer-sized tip sliding on a surface is related to the thermally activated hopping of the contact atoms on an effective atomic interaction potential. A general analytical expression relates the height of this potential and the h ...
The aim of this project work is to fabricate and evaluate a resonating silicon tube as a density and a Coriolis-based mass flow sensor. This project consists of three course works: a project work, a microelectronics project, and a master thesis. At first, ...
Any innovative design of a chem. or biol. reactor has to consider the dynamics of the primary phys. and chem. steps involved in the overall process. For homogeneous highly viscous systems the mixing time is of crucial importance for the product quality. In ...
Optimization in the process industry has received a lot of attention in recent years because, in the face of growing competition, it represents a natural choice for reducing production costs, improving product quality, and meeting safety requirements and e ...
