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High power modular LED-based illumination system for lithography applications

Publications associées (53)

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Printed ecoresorbable temperature sensors for environmental monitoring

Danick Briand, Nicolas Francis Fumeaux, James Alec Pierce Bourely, Melissa Kossairi

Abstract Electronic waste has become a pressing issue, necessitating sustainable solutions for the disposal of electronic devices. While the development of environmentally degradable electronics has gained attention, the fabrication of stable and performan ...

2023

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IntroductionThe jellyfish Cassiopea has a conspicuous lifestyle, positioning itself upside-down on sediments in shallow waters thereby exposing its photosynthetic endosymbionts (Symbiodiniaceae) to light. Several studies have shown how the photosymbionts b ...

FRONTIERS MEDIA SA2023

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Over the last decades, three-dimensional micro-manufacturing of fused silica via near-infrared ultrafast laser exposure combined with an etching step has become an established technique for producing complex three-dimensional components. Here, we explore t ...

2023

Photochemical Alkynylations with Hypervalent Iodine Reagents

Stephanie Grace Elizabeth Amos

Over the past twenty years, photochemical transformations have gained in importance in organic chemistry. Indeed, the development of photocatalysts has allowed the use of visible light as an energy source for chemical transformations. More specifically, ph ...

EPFL2022

Effects of illuminance intensity on the green channel of remote photoplethysmography (rPPG) signals

Ata Jedari Golparvar

Point-of-care remote photoplethysmography (rPPG) devices that utilize low-cost RGB cameras have drawn considerable attention due to their convenience in contactless and non-invasive vital signs monitoring. In rPPG, sufficient lighting conditions are essent ...

SPRINGER2022

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Tolerancing is an important step toward the fabrication of high-quality and cost-effective lens surfaces. It is critical for wafer-level optics, when up to tens of thousands microlenses are fabricated in parallel and whose surfaces cannot be formed individ ...

OPTICAL SOC AMER2020

Spatial coherence properties of an LED-based illumination system for mask-aligner lithography

Hans Peter Herzig, Toralf Scharf, Wilfried Noell, Raoul Kirner, Johana Bernasconi

A high-power LED-based illumination system has been developed as a replacement for the mercury arc lamps used in mask-aligner lithography. LEDs are arranged in a grid array and placed in the entrance aperture of individual reflectors. Those reflectors decr ...

SPIE2019

A Light Pollution Simulator

Denis Gillet, Juan Carlos Farah

In the framework of the Dark Skies Rangers project, we have developed a light pollution simulator aimed at demonstrating the impact of artificial light on the observation of the night sky. The simulator illustrates a nocturnal countryside scenery, with a h ...

2019

Computational rule-based approach for corner correction of non-Manhattan geometries in mask aligner photolithography

Toralf Scharf, Wilfried Noell, Chen Yan, Raoul Kirner, Andreas Vetter

In proximity mask aligner photolithography, diffraction of light at the mask pattern is the predominant source for image shape distortions such as line end shortening and corner rounding. One established method to mitigate the impact of diffraction is opti ...

2019

The information age we live in today relies on highly integrated devices. They are fabricated with the help of photolithography, the patterning technique at the heart of their production. With the continuous demand for higher integration density to achieve ...

EPFL2019