High power modular LED-based illumination system for lithography applications
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Annular folded imagers can be up to 10× thinner than corresponding full-aperture imagers, but have tight fabrication tolerances and relatively shallow depth of focus. Wavefront coding, the use of specialized optics with postdetection signal processing, has ...
The endeavour to develop nanodevices demands for patterning methods in the nanometer scale. The continuous improvement in lithography methods based on deep UV (DUV), X-ray, or electron beam exposure allow for further progress in integrated circuit hardware ...
A novel local illumination scheme for optical lithography is proposed. It is based on the excitation of a surface plasmon on a metal film incorporated into a polymer light coupling mask for contact lithography. The electromagnetic field associated with the ...
We compare three different approaches to high-resolution contact lithography with special emphasis on contrast mechanisms for subwavelength structures. Masks with protruding metal absorbers, masks with absorbers embedded in the transparent background, and ...
The photogoniometer is composed of a computer-controlled movable mechanical support, presenting two main rotation axes that are powered by DC motors. It uses an accurate and reliable gear technology (harmonic drivers) and is controlled by a micro-computer. ...
Optical Coherence Tomography (OCT), a well-established imaging method based on low-coherence interferometry, provides cross-sectional images of the internal structure of biological samples with a resolution in the micrometer range. OCT was successfully app ...
It was about 125 years ago that the light bulb was commercialized by Thomas Edison. No doubt a brilliant invention at the time, today its low power conversion efficiency is one of the reasons why lighting in the western world has such high energy consumpti ...
Stencil lithography is a surface patterning technique that relies on the local deposition of material through miniaturized shadow mask membranes. This method has been used since many years in various implementations for the formation of patterns, mainly st ...
We present results of the optical characterization of silicon photonic crystal waveguides and microcavities that are completely buried in a silicon dioxide cladding and are fabricated by deep ultraviolet (UV) lithography. The advantages of buried waveguide ...
We present results of the optical characterization of silicon photonic crystal waveguides and microcavities that are completely buried in a silicon dioxide cladding and are fabricated by deep ultraviolet (UV) lithography. The advantages of buried waveguide ...