Active Electroacoustic Resonators and their Applications to Non-Hermitian Acoustics
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Thin-film lithium niobate (LNO) has been identified as a promising material platform for enabling high electromechanical coupling and low-loss piezoelectric resonators for filtering applications. In this work, the design and fabrication of fundamental shea ...
IEEE2022
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Sound absorption at low frequencies still remains a challenge in both scientific research and engineering practice. Natural porous materials are ineffective in this frequency range, as well as acoustic resonators which present too narrow bandwidth of absor ...
2022
Position measurements of mechanical oscillators underpin experiments spanning from applied nanoscale sensing to endeavors aiming to resolve open fundamental problems of modern physics. Sufficiently precise position measurements are also used for engineerin ...
EPFL2020
Fields of technology as diverse as microwave filter construction, characterization of material interfaces with atomic precision, and detection of gravitational waves from astronomical sources employ mechanical resonators at their core. The utility of mecha ...
EPFL2023
RF MEMS piezoelectric acoustic resonators are the essential building blocks for RF filters used in RF front-end modules for wireless mobile communication due to their compact size in the MHz-GHz frequency range, high Quality factors and large relative band ...
EPFL2022
The objective of this PhD thesis is the development of a microfluidic platform for the real-time measurements of the mechanical properties of biological analytes at the single entity level.The systems developed for these purposes consist of piezoelectrical ...
EPFL2022
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Suspended nanochannel resonators (SNRs) are promising devices able to characterize mass down to the attogram scale, thus being able to detect nanoparticles or biomolecules. In this paper, we present a flexible fabrication process for SNRs based on a sacrif ...
ELSEVIER2020
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In a free ZY-LiNbO3 400nm thick platelet, narrow electrodes (500nm wide) placed periodically with a pitch of few micrometers can eXcite standing Bulk Acoustic shear wave Resonances (XBARs), by means of lateral electric field parallel to crystalline Y- axis ...
A suspended 400nm thin mono-crystalline ZY cut Lithium Niobate (LN) membrane with narrow interdigital electrodes (IDEs) on top having a pitch of the order of few microns excites standing shear bulk acoustic wave resonance (XBAR) within the membrane through ...
This semester project aimed at simulating two approaches for low temperature dependence of resonance frequency of resonators. The first one consists in using AT-cut quartz as the resonator’s material. The AT-cut quartz wafers are made using a 35° angle wit ...