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Active Electroacoustic Resonators and their Applications to Non-Hermitian Acoustics

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Fields of technology as diverse as microwave filter construction, characterization of material interfaces with atomic precision, and detection of gravitational waves from astronomical sources employ mechanical resonators at their core. The utility of mecha ...

EPFL2023

Thin-film lithium niobate (LNO) has been identified as a promising material platform for enabling high electromechanical coupling and low-loss piezoelectric resonators for filtering applications. In this work, the design and fabrication of fundamental shea ...

IEEE2022

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Sound absorption at low frequencies still remains a challenge in both scientific research and engineering practice. Natural porous materials are ineffective in this frequency range, as well as acoustic resonators which present too narrow bandwidth of absor ...

2022

Development of Thin Film Lithium Niobate Shear Bulk Acoustic Wave Resonators

Soumya Yandrapalli

RF MEMS piezoelectric acoustic resonators are the essential building blocks for RF filters used in RF front-end modules for wireless mobile communication due to their compact size in the MHz-GHz frequency range, high Quality factors and large relative band ...

EPFL2022

Piezoelectric suspended microchannel resonators

Damien Maillard

The objective of this PhD thesis is the development of a microfluidic platform for the real-time measurements of the mechanical properties of biological analytes at the single entity level.The systems developed for these purposes consist of piezoelectrical ...

EPFL2022

FEM simulation: Thermal properties of thin film quartz and silicon resonators

This semester project aimed at simulating two approaches for low temperature dependence of resonance frequency of resonators. The first one consists in using AT-cut quartz as the resonator’s material. The AT-cut quartz wafers are made using a 35° angle wit ...

2021

Fabrication of clamped-clamped beam resonators with embedded fluidic nanochannel

Philippe Renaud, Luis Guillermo Villanueva Torrijo, Annalisa De Pastina, Damien Maillard, Stefano Silvio Giovanni Varricchio, Carlo Ricciardi, Davide Scaiola, Stefano Stassi

Suspended nanochannel resonators (SNRs) are promising devices able to characterize mass down to the attogram scale, thus being able to detect nanoparticles or biomolecules. In this paper, we present a flexible fabrication process for SNRs based on a sacrif ...

ELSEVIER2020

Mechanical resonators with high dissipation dilution in precision and quantum measurements

Sergey Fedorov

Position measurements of mechanical oscillators underpin experiments spanning from applied nanoscale sensing to endeavors aiming to resolve open fundamental problems of modern physics. Sufficiently precise position measurements are also used for engineerin ...

EPFL2020

Analysis of XBAR resonance and higher order spurious modes

Luis Guillermo Villanueva Torrijo, Soumya Yandrapalli, Victor Plessky

A suspended 400nm thin mono-crystalline ZY cut Lithium Niobate (LN) membrane with narrow interdigital electrodes (IDEs) on top having a pitch of the order of few microns excites standing shear bulk acoustic wave resonance (XBAR) within the membrane through ...

IEEE2019

Laterally excited bulk wave resonators (XBARs) based on thin Lithium Niobate platelet for 5GHz and 13 GHz filters

Luis Guillermo Villanueva Torrijo, Annalisa De Pastina, Soumya Yandrapalli, Victor Plessky, Muhammad Faizan

In a free ZY-LiNbO3 400nm thick platelet, narrow electrodes (500nm wide) placed periodically with a pitch of few micrometers can eXcite standing Bulk Acoustic shear wave Resonances (XBARs), by means of lateral electric field parallel to crystalline Y- axis ...

IEEE2019