Fabrication and Characterization of Freestanding Single Crystal Diamond and Silicon Microresonators
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We study GaN-based light emitting diodes incorporating an omnidirectional photonic crystal with Archimedean lattice. Photonic bands are observed over several Brillouin zones, revealing reciprocal space symmetries and evidencing the omnidirectionality of th ...
Using surface micromachining technology, we fabricated nanofluidic devices with channels down to 10̂nm deep, 200̂nm wide and up to 8̂cm long. We demonstrated that different materials, such as silicon nitride, polysilicon and silicon dioxide, combined with ...
Three different kinds of two-port flexural resonators, with both clamped and free ends, and with nominal resonance frequencies between 5 MHz and 50 MHz, were designed and fabricated. Among them, a novel free-free third-mode resonator, as well as a tunable ...
Several physical quantities of interest are of quantum nature, often measurable as distinct particles. Light is one such example, photons being its particles. In conventional detectors, light is converted onto electrical charges and hence onto a current or ...
Stencil lithography is an innovative method for patterning that has a great flexibility from many points of view. It is based on shadow mask evaporation using thin silicon nitride membranes that allow the patterning of sub-100 nm features up to 100 μm in a ...
We present all-optical tuning and switching of a microcavity inside a two-dimensional photonic crystal waveguide. The photonic crystal structure is fabricated in silicon-on-insulator using complementary metal-oxide semiconductor processing techniques based ...
In this paper, we present the design, simulation, fabrication, and some measurement and characterization of a novel 16-bit digital variable optical attenuator (VOA) that attenuates by switching individual mirror of an array as an attempt to achieve input v ...
Micro- and nano-optical structures offer the possibility to control light on a wavelength scale. This allows further miniaturization of integrated optical circuits. Planar photonic crystal waveguides and microcavities are considered basic building blocks f ...
This work addresses feature size effects (the lag-effect and roughness development) in chemically assisted ion beam etching (CAIBE) etching of InP-based photonic crystals. Photonic crystal fields with varying hole size and periods were etched with differen ...
International Society for Optical Engineering, Bellingham WA, WA 98227-0010, United States2006
Semiconductor nanowires have received much attention owing to their potential use as building blocks of miniaturized electrical(1), nanofluidic(2) and optical devices(3). Although chemical nanowire synthesis procedures have matured and now yield nanowires ...