Fabrication and Characterization of Freestanding Single Crystal Diamond and Silicon Microresonators
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Modern communication devices demand challenging specifications in terms of miniaturization, performance, power consumption and cost. Every new generation of radio frequency integrated circuits (RF-ICs) offer better functionality at reduced size, power cons ...
Wireless communication systems and handset devices are showing a rapid growth in consumer and military applications. Applications using wireless communication standards such as personal connectivity devices (Bluetooth), mobile systems (GSM, UMTS, WCDMA) an ...
In this communication, we report on the integration of metal-oxide gas sensors on polymeric micro-hotplates made on polyimide and silicon substrates. Low-power consumption micro-hotplates with platinum electrodes and heaters were fabricated on polyimide me ...
Photonic crystals are periodic dielectric structures having periodicity of the order of the wavelength. Consequently, they offer the ability to control the propagation of electromagnetic waves in a similar way as the periodic potential aspects the electron ...
Institut de Microtechnique, Université de Neuchâtel2006
NOVELTY - A nanowire assembly method comprises optically trapping a semiconductor nanowire with an infrared single-beam optical trap and attaching the nanowire to an organic or inorganic structure by laser fusing. The nanowire is further trapped in a fluid ...
Increasing interest in specific applications in the field of micro- and nano-electromechanical systems (MEMS and NEMS) has raised the request for new functional polymeric materials. Epoxy based photoresists are being broadly used for the fabrication of mic ...
A novel concept for shear mode Bulk Acoustic Resonators (BAR) is presented. It is based on c-axis oriented AlN thin films grown on silicon dioxide thin films, combined with interdigitated electrodes. Such a structure leads to an excitation of mainly shear ...
Ieee Service Center, 445 Hoes Lane, Po Box 1331, Piscataway, Nj 08855-1331 Usa2008
We report measurements of displacement and mechanical work for miniaturized Dielectric Elastomer Actuators (DEAs) whose compliant electrodes were fabricated using metal ion implantation. 20 to 30 μm thick Polydimethylsiloxane (PDMS) membranes were bonded t ...
The authors address feature-size dependence in Ar/Cl2 chemically assisted ion beam etching (CAIBE) in the context of the fabrication of photonic crystal (PhC) structures. They systematically investigate the influence of various parameters such a ...
The design, fabrication and experimental investigation of 21MHz MEM Bulk Lateral Resonators (BLR) on 1.5 mu m Silicon-On-Insulator (SOI) Fragmented Membranes with 100nm air-gaps are reported(#). Quality factors as high as 33'000 are measured under vacuum a ...
Ieee Service Center, 445 Hoes Lane, Po Box 1331, Piscataway, Nj 08855-1331 Usa2007