Fabrication and Characterization of MEMS Piezoelectric Accelerometers

In this master thesis, the use of MEMS technology to miniaturize existing accelerometers used for vibration sensing is demonstrated. An updated process flow was established and carried out in the cleanrooms. MEMS piezoelectric accelerometers were fabricated and known fabrication issues were successfully avoided. A first characterization of the fabricated devices was done, and results show a strong agreement with the FEM simulations done during and before this project. FEM simulations were done for alternative designs and showed a possibility to almost double the charge generation of the accelerometers.