An atomic force microscope integrated with a helium ion microscope for correlative nanoscale characterization
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NOVELTY - The microscope has a housing (12), and two actuators (14, 16) are arranged in an opposed push-pull configuration that is coupled to the housing. A support (22) is coupled to the housing and to one of the two actuators at a position that is spaced ...
A new scanner design for a high-speed atomic force microscope (AFM) is presented and discussed in terms of modeling and control. The lowest resonance frequency of this scanner is above 22 kHz. The X and Y scan ranges are 13 micrometers and the Z range is 4 ...
The evolution path of nanotechnologies moves through the domain of microscopy. Among all the kinds of imaging tools available today, optical imaging systems are of primary importance. When using optical imaging systems, we take profit of the information re ...
Institut de Microtechnique, Université de Neuchâtel2006
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