An atomic force microscope integrated with a helium ion microscope for correlative nanoscale characterization
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Institut de Microtechnique, Université de Neuchâtel2006
NOVELTY - The microscope has a housing (12), and two actuators (14, 16) are arranged in an opposed push-pull configuration that is coupled to the housing. A support (22) is coupled to the housing and to one of the two actuators at a position that is spaced ...
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