Publication
Resonant Pzt Mems Mirror With Segmented Electrodes
Résumé
We report a transduction optimization method of piezo-based MEMS structures using segmentation of the excitation electrodes. Optimal transduction is achieved by matching the electric field distribution to the polarization distribution including the direct piezoelectric action caused by mechanical motion of the desired mode. Next, topological optimization of electrodes using custom Matlab scripts is applied to segment the electrodes. Method was applied to improve the design of the existing state-of-the art resonant piezoelectric MEMS mirrors. The optimized mirrors were fabricated and feature an 80 % increase in the optical scan angle (theta(opt)), lower dynamic deformation as well as 26 % reduction in power consumption compared to original design.
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Proximité ontologique
Concepts associés (20)
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thumb|Champ électrique associé à son propagateur qu'est le photon. right|thumb|Michael Faraday introduisit la notion de champ électrique. En physique, le champ électrique est le champ vectoriel créé par des particules électriquement chargées. Plus précisément, des particules chargées modifient les propriétés locales de l'espace, ce que traduit justement la notion de champ. Si une autre charge se trouve dans ce champ, elle subira l'action de la force électrique exercée à distance par la particule : le champ électrique est en quelque sorte le "médiateur" de cette action à distance.
Potentiel électrique
Le potentiel électrique, exprimé en volts (symbole : V), est l'une des grandeurs définissant l'état électrique d'un point de l'espace. Il correspond à l'énergie potentielle électrostatique que posséderait une charge électrique unitaire située en ce point, c'est-à-dire à l'énergie potentielle (mesurée en joules) d'une particule chargée en ce point divisée par la charge (mesurée en coulombs) de la particule.
Electric dipole moment
The electric dipole moment is a measure of the separation of positive and negative electrical charges within a system, that is, a measure of the system's overall polarity. The SI unit for electric dipole moment is the coulomb-meter (C⋅m). The debye (D) is another unit of measurement used in atomic physics and chemistry. Theoretically, an electric dipole is defined by the first-order term of the multipole expansion; it consists of two equal and opposite charges that are infinitesimally close together, although real dipoles have separated charge.
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