MEMS offer low power tunability to silicon photonics. However, reported phase shifters lack in range, IL, or linearity. We show pi linear phase shift in compact, 0.2 dB-IL MEMS devices, and demonstrate trade-offs for scalability. (C) 2020 The Author(s)
Kirsten Emilie Moselund, Chang Won Lee
Tobias Kippenberg, Viacheslav Snigirev, Grigorii Likhachev