Nanomechanical bio-sensing for fast and reliable detection of viability and susceptibility of microorganisms
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Lithography on (100) single-crystal silicon and amorphous silicon is performed by electric-field-enhanced local oxidation of silicon using an atomic force microscope (AFM). Amorphous silicon is used as a negative resist to pattern silicon oxide, silicon ni ...
In the past, conducting AFM probes have been made by coating standard Si-cantilevers and tips with a thin film of e.g. tungsten (W). Here, we describe a new AFM probe made entirely out of tungsten. The fabrication involves microfabrication techniques such ...
We have developed hybrid AFM probes with SU-8 polymer body and full platinum and tungsten cantilever and tip. The fabrication process uses surface micromachining of a (100) silicon wafer. The metal (platinum or tungsten) is sputter deposited in oxidation s ...
This thesis describes the synthesis of carbon nanotubes (CNTs) by chemical vapor deposition (CVD) and the evaluation of them as tips of atomic force microscope (AFM) probes. Both arc-discharge and CVD grown nanotubes were investigated as AFM tips. Two meth ...
Our research is centered on the engineering of structures at the mesoscopic length scale. Patterns between the micrometer and nanometer bridge molecules and biological cells to microelectronics and microsystems, and further to the macroworld, and vice vers ...
We develop wear resistant, electrically conducting AFM probes. Here, we describe a new AFM probe made entirely out of tungsten (W). The fabrication involves microfabrication techniques such as surface moulding, thin-film structuring of tungsten and high as ...