Hierarchical tensile structures with ultralow mechanical dissipation

Structural hierarchy is found in myriad biological systems and has improved man-made structures ranging from the Eiffel tower to optical cavities. In mechanical resonators whose rigidity is provided by static tension, structural hierarchy can reduce the dissipation of the fundamental mode to ultralow levels due to an unconventional form of soft clamping. Here, we apply hierarchical design to silicon nitride nanomechanical resonators and realize binary tree-shaped resonators with room temperature quality factors as high as 7.8 x 10(8) at 107 kHz frequency (1.1 x 10(9) at T= 6 K). The resonators' thermal-noise-limited force sensitivities reach 740 zN/Hz(1/2) at room temperature and 90 zN/Hz(1/2) at 6 K, surpassing state-of-the-art cantilevers currently used for force microscopy. Moreover, we demonstrate hierarchically structured, ultralow dissipation membranes suitable for interferometric position measurements in Fabry-Perot cavities. Hierarchical nanomechanical resonators open new avenues in force sensing, signal transduction and quantum optomechanics, where low dissipation is paramount and operation with the fundamental mode is often advantageous.

Ultra low quantum decoherence nano-optomechanical systems

Mohammadjafar Bereyhi

Thermal motion of a room-temperature mechanical resonator typically dominates the quantum backaction of its position measurement. This is a longstanding barrier for exploring cavity optomechanics at room temperature. In order to enter the quantum regime of the optomechanical interaction, we need to be in the "backaction-dominated" regime, where we can study the limits of quantum measurement and how to circumvent them. To create a system which can enter the quantum regime, the optomechanical transducer has to satisfy certain criteria. A quantum-enabled optomechanical system consists of an optical cavity and a mechanical resonator with ultra low quantum decoherence, which are strongly coupled to each other via the optomechanical interaction.High stress silicon nitride has enabled nanomechanical resonators with exceptionally low dissipation at room temperature via several soft-clamping techniques. Achieving high optomechanical coupling to these coherent nanobeams results in high optomechanical cooperativities, thus alleviating the thermal motion barrier for room temperature quantum optomechanics. Monolithic integration of high-Q nanobeam resonators with optical cavities has been limited to doubly-clamped nanobeams due to the complexity of the device fabrication and long device sizes required for conventional soft-clamping using phononic crystals. In addition, the previous demonstrations of such systems showed limited optomechanical couplings thus a limited single photon cooperativity.I present the design, fabrication and characterization of three different classes of nanomechanical resonators clamp-tapered, fractal-like, and polygon resonators, which support perimeter modes, with Q factors exceeding 3 billion at room temperature and their optical readout using an integrated nearfield nano-optomechanical transducer using high stress silicon nitride. Our transducer features a one-dimensional Fabry-Perot optical cavity integrated with a high-Q nanomechanical resonator. The Fabry-Perot optical cavity is formed by patterning two photonic crystal reflectors on a silicon nitride waveguide designed for high-Q optical modes. Our approach allows individual optimization of optical and mechanical resonators, while maintaining a high optomechanical coupling rate due to large optomechanical mode overlap. Our best performing devices show on-chip optomechanical transducers with single photon cooperativities as high as 123 with mechanical quality factor of 120 million at room temperature. The developed system is of great interest to the optomechanics and sensing community. In quantum optomechanics, it will serve as a platform for quantum feedback control of the nanomechanical resonators to achieve motional ground state of a macroscopic resonator and generation of squeezed light at room temperature. Owing to their record value mechanical quality factors, the room temperature force sensitivity of our highest Q perimeter modes is on par with atomic force microscopy cantilevers at millikelvin temperature.Complete documentation of a nanofabrication process is the key to its reproducibility. Process-specific details of the fabrication techniques are usually missing in journal publications. To bridge this gap, I developed NanoFab-net.org. An online open-access tool that allows sharing process-specific fabrication reports, extracting the metadata and obtaining a unique digital object identifier (DOI) for each report.

EPFL2022

Perimeter Modes of Nanomechanical Resonators Exhibit Quality Factors Exceeding 10(9) at Room Temperature

Amirali Arabmoheghi, Alberto Beccari, Sergey Fedorov, Guanhao Huang, Tobias Kippenberg

Systems with low mechanical dissipation are extensively used in precision measurements such as gravitational wave detection, atomic force microscopy, and quantum control of mechanical oscillators via optomechanics and electromechanics. The mechanical quality factor (Q) of these systems determines the thermomechanical force noise and the thermal decoherence rate of mechanical quantum states. While the dissipation rate is typically set by the bulk acoustic properties of the material, by exploiting dissipation dilution, mechanical Q can be engineered through geometry and increased by many orders of magnitude Recently, soft clamping in combination with strain engineering has enabled room temperature quality factors approaching 10(9) in millimeter-scale resonators. Here we demonstrate a new approach to soft clamping which exploits vibrations in the perimeter of polygon-shaped resonators tethered at their vertices. In contrast to previous approaches, which rely on cascaded elements to achieve soft clamping, perimeter modes are soft clamped due to symmetry and the boundary conditions at the polygon vertices. Perimeter modes reach Q's of 3.6 x 10(9)-a record at room temperature-while spanning only two acoustic wavelengths. We demonstrate thermal-noise-limited force sensitivity of 1.3 aN/root Hz for a 226 kHz perimeter mode with quality factor of 1.5 x 10(9) at room temperature. The small size of our devices makes them well suited for near-field integration with microcavities for quantum optomechanical experiments. Moreover, their compactness allows the realization of phononic lattices. We demonstrate a one-dimensional Su-Schrieffer-Heeger chain of high-Q perimeter modes coupled via nearest-neighbour interaction and characterize the localized edge modes.

AMER PHYSICAL SOC2022

A hybrid on-chip optomechanical transducer for ultrasensitive force measurements

Emanuel Gavartin, Tobias Kippenberg

Nanoscale mechanical oscillators(1) are used as ultrasensitive detectors of force(2), mass(3) and charge(4). Nanomechanical oscillators have also been coupled with optical and electronic resonators to explore the quantum properties of mechanical systems(5). Here, we report an optomechanical transducer in which a Si3N4 nanomechanical beam(6,7) is coupled to a disk-shaped optical resonator made of silica on a single chip. We demonstrate a force sensitivity of 74 aN Hz(-1/2) at room temperature with a readout stability better than 1% at the minute scale. Our system is particularly suited for the detection of very weak incoherent forces, which is difficult with existing approaches because the force resolution scales with the fourth root of the averaging time(8). By applying dissipative feedback(9) based on radiation pressure, we significantly relax this constraint and are able to detect an incoherent force with a force spectral density of just 15 aN Hz(-1/2) (which is 25 times less than the thermal noise) within 35 s of averaging time (which is 30 times less than the averaging time that would be needed in the absence of feedback). It is envisaged that our hybrid on-chip transducer could improve the performance of various forms of force microscopy(8,10-12).

Nature Publishing Group2012

Ultra low quantum decoherence nano-optomechanical systems

Mohammadjafar Bereyhi

EPFL2022