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Piezoelectric thin films on Quartz substrate

Publications associées (45)

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Effect of Mo addition on the mechanical and tribological properties of magnetron sputtered TiN films

Sami Rtimi

Ternary-based titanium nitride (TiN) thin films have drawn attention toward rational applications due to their wear resistance, high hardness, and corrosion resistance. The influence of Mo content on the structural, tribo-logical, and mechanical properties ...

ELSEVIER SCIENCE SA2023

A 510-pW 32-kHz Crystal Oscillator With High Energy-to-Noise-Ratio Pulse Injection

Kyojin Choo, Li Xu

This article introduces a 32-kHz crystal oscillator (XO) with high energy-to-noise-ratio pulse injection at subharmonic frequency. A T/4-delay clock slicer is proposed to convert the sinusoidal crystal waveform into an output clock of 32 kHz and to introdu ...

IEEE2021

In the past half-century, the semiconductor industry has relied on the scaling of complementary metal-oxide-semiconductor (CMOS) transistor dimensions and on material and geometrical innovations to increase the computational density. Approaching the end of ...

EPFL2018

DC reactive magnetron sputtered Nb2AlyNx coatings with various Al contents (y/(y + z)) ranging from 0 to 0.75 were deposited using different ratios of the currents applied to the Al and Nb targets in order to systematically control their chemical compositi ...

Elsevier Science Sa2017

This project focused on optimization of the deposition of platinum (Pt) thin films or use in piezoelectric MEMS/NEMS devices. Theory of piezoelectric, DC and DC-pulsed sputtering and thin film characterization was studied. Two parameters were varied in the ...

2017

Recent improvements on micro-thermocouple based SThM

Danick Briand

The scanning thermal microscope (SThM) has become a versatile tool for local surface temperature mapping or measuring thermal properties of solid materials. In this article, we present recent improvements in a SThM system, based on a micro-wire thermocoupl ...

Iop Publishing Ltd2017

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Aluminium scandium nitride (ASN) exhibits a largely enhanced piezoelectric response as compared to aluminium nitride (AlN), which makes it an upcoming piezoelectric material for use in next generation RF filters, sensors, actuators and energy harvesting de ...

Ieee2017

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Classical pivots have frictional losses leading to the limited quality factor of oscillators used as time bases in mechanical watches. Flexure pivots address these issues by greatly reducing friction. However, they have drawbacks such as gravity sensitivit ...

2016

The mechanism for the growth of 3D ZnO nanowall networks in nest-like structure by a pulsed laser deposition (PLD) technique have been investigated for dye sensitized solar cells (DSSCs) and biosensor applications. As complex oxides shift towards large vol ...

Elsevier2015

Thickness Dependence of Structural and Electrical Properties of Thin InN Grown by Radio-Frequency Plasma-Assisted Molecular Beam Epitaxy

Elison de Nazareth Matioli

We have succeeded in achieving high-quality thin InN films (

Iop Publishing Ltd2013