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Etching selectivity and passivity of Al2O3 layers

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Etching selectivity and passivity of Al2O3 layers

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Fabrication and characterization of metal nanolevers made by shadow mask technology

Nanomechanical structures with 91 MHz resonance frequency fabricated by local deposition and dry etching

Resistless Fabrication and Characterisation of Metal Nanolevers Arrays

Coated, light-transmitting or reflecting substrate, used as optical component or window, e.g. lens, mirror or windscreen, has (per)fluoroalkylsilane coating produced by plasma etching, hydration, drying and gas phase deposition

Size-effect in mesoscopic epitaxial ferroelectric structures: Increase of piezoelectric response with decreasing feature-size

Fabrication and application of a full wafer size micro/nanostencil for multiple length-scale surface patterning

Size effect in mesoscopic epitaxial ferroelectric structures: Increase of piezoelectric response with decreasing feature size

Fabrication and characterization of metal nanolevers made by shadow mask technology

90 MHz nanomechanical structures fabricated by stencil deposition and dry etching

90 MHz nanomechanical structures fabricated by stencil deposition and dry etching