HfC Sputtering parameters optimization and film characterization
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DC reactive magnetron sputtering was used for the deposition of Zr–Si–N thin films. Four series of samples have been deposited at various substrate temperatures TS: 300 K, 510 K, 710 K and 910 K. Depending on TS, different N2 partial pressures pN2 were req ...
The determination of the thermal and athermal stress components using relaxation experiments along a stress-strain curve is critically evaluated. Short-term stress-relaxations are performed along the stress-strain curve of single crystals of Ge at 850 K, C ...
The fragmentation behaviour of a thin brittle coating attached to a ductile substrate subjected to equibiaxial quasi-static in-plane tension is studied. The experimentally observed cracking patterns are related to repetitively branching coating cracks. The ...
Medical grade poly(vinyl chloride) was modified by RF plasma-deposition of teflon-like coatings to create a platform for the physisorption of PEO-containing copolymers, Pluronics (R). Thin teflon-like coatings were deposited in an RF-plasma reactor by plas ...
Airway wall remodeling is a hallmark of asthma, characterized by subepithelial thickening and extracellular matrix (ECM) remodeling. Mechanical stress due to hyperresponsive smooth muscle cells may contribute to this remodeling, but its extent and relevanc ...
We present a MEMS process for the fabrication of arbitrary (adaptable to specific aperture geometries) stabilization of silicon nitride membranes to be used as miniature shadow masks or (nano) stencils. Stabilization was realized by the fabrication of sili ...
This thesis reports on the successful use of low-energy metal ion implantation to fabricate compliant electrodes for miniaturized dielectric elastomer actuators (DEAs, also known as artificial muscles). DEAs are elastomeric actuators capable of large defor ...
Cohesive and adhesive properties of silicon oxide barrier coatings deposited from an oxygen/hexamethyldisiloxane gas mixture by plasma enhanced chemical vapor deposition, with controlled incorporation of carbon on 12 mm thick polyethylene terephtalate film ...
Using infra-red (IR) thermography, power loads onto the MKII Gas-Box divertor targets have been investigated in Type-I ELMy H-Mode plasmas at JET in medium current discharges (I-p = 2.6MA and B-T = 2.7 T). Heat fluxes are calculated from the measured diver ...
We have developed a new hybrid AFM probe combining an SU-8 polymer body with a full tungsten cantilever having a nanometric tip. The fabrication is based on surface micromachining a silicon wafer, where tungsten is sputter deposited in oxidation sharpened ...
