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Aperture-Controlled Fabrication of All-Dielectric Structural Color Pixels

Publications associées (32)

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Piezoelectric wurtzite ScxAl1-xN (x = 0, 0.1, 0.2, 0.3) thin films were epitaxially grown by reactive magnetron co-sputtering from elemental Sc and Al targets. Al2O3(0001) wafers with TiN(111) seed and electrode layers were used as substrates. X-ray diffra ...

American Institute of Physics2012

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Remote sensing finds more and more applications, from industrial control, to face recognition, not forgetting terrain surveying. This trend is well exemplified by fringe projection techniques, which enjoyed a considerable development in the recent years. I ...

Optical Society of America2011

AIN Thin Film Structures for High-Q Resonators

Alvaro Artieda

The development of wireless and mobile communication in the last decade led to the elaboration of new components based on thin films with continually increasing performance and reduced fabrication cost. A fundamental element for mobile communication is the ...

EPFL2010

SOI digital pixel sensor based on charge pumping

Maher Kayal, Jean-Michel Sallese, Louis Harik

In this paper, a digital pixel sensor in silicon on insulator (SOI) is presented. The active part is a partially depleted SOI phototransistor. The technique elaborated in Harik et al. (2008) [1] was designed and implemented. Moreover, we took advantage of ...

Elsevier2010

Finite element analysis and experiments on a silicon membrane actuated by an epitaxial PZT thin film for localized-mass sensing applications

Nico de Rooij, Danick Briand, Don Isarakorn

In this paper, we investigate the performance of a piezoelectric membrane actuated by an epitaxial piezoelectric Pb(Zr0.2Ti0.8)O-3 (PZT) thin film for localized-mass sensing applications. The fabrication and characterization of piezoelectric circular membr ...

Elsevier2010

Organic Pentacene Thin Film Transistors on Flexible Substrates Fabricated by Stencil Lithography

Katrin Sidler Arnet

This thesis presents the fabrication and characterization of organic thin film transistors (TFTs) on flexible polymer substrates and the development of compliant stencil lithography to significantly improve the patterning resolution on full-wafer scale. Po ...

EPFL2010

Measurement and performance evaluation of a silicon on insulator pixel matrix

Maher Kayal, Jean-Michel Sallese, Louis Harik

A new technique for driving silicon-on-insulator pixel matrixes has been proposed in [1], which was based on transient charge pumping for evacuating the extra photo-generated charges from the body of the transistor. An 8×8 pixel matrix was designed and fab ...

2010

Thin Film Bulk Acoustic Wave Resonators (TFBARs) had been developed a decade ago and since then were implemented extensively in mobile communications devices. The "heart" of a TFBAR consists of a piezoelectric film that operates as an acousto-electric tran ...

EPFL2009

Polar phonons in some compressively stressed epitaxial and polycrystalline SrTiO3 thin films

Nava Setter, Alexander Tagantsev

everal SrTiO3 (STO) thin films without electrodes processed by pulsed laser deposition, of thicknesses down to 40 nm, were studied using infrared transmission and reflection spectroscopy. The complex dielectric responses of polar phonon modes, particularly ...

2009

High coupling materials for thin film bulk acoustic wave resonators

Janine Conde

Radio frequency (RF) filters based on bulk acoustic wave resonances in piezoelectric thin films have become indispensable components in mobile communications. The currently used material, AlN, exhibits many excellent properties for this purpose. However, i ...

EPFL2009