Water-permeation sensor and method for making the same

Yves Leterrier, Stéphanie Lacour, Kyungjin Kim, Massimo Mariello
2024
Brevet

Résumé

A water permeation sensor suitable for monitoring and quantitatively assessing ultra-low permeability of thin film encapsulations engineered for bioelectronic microdevices, its fabrication as well as device comprising the same are disclosed herein.

Source officielle

https://infoscience.epfl.ch/record/309270?ln=fr

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Water-permeation sensor and method for making the same

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Stencil-Based Selective Surface Functionalization of Silicon Nanowires in 3D Device Architectures for Next-Generation Biochemical Sensors

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