Imaging breakdown spots in SiO2 films and MOS devices with a conductive atomic force microscope
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Scaling of semiconductor devices has pushed CMOS devices close to fundamental limits. The remarkable success story of Moore's law during the last 40 years, predicting the evolution of electronic device performances related to miniaturization, has always be ...
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Process optimization and properties of lead zirconate titanate (PZT) films for piezoelectric micromachined ultrasonic transducers (pMUTs) for scanning probe devices will be presented. The goal of the work was a replacement of the tetragenic and mutagenic s ...
Two-dimensional (2D) semiconductors, consisting of single-sheets of layered transition metal dichalcogenides (TMD), are attracting enormous interest from both fundamental science and technology. Monolayer molybdenum disulfide (MoS2), a typical example from ...
The coupling of stimuli-responsive macromolecules to nanostructured surfaces opens the perspective for the fabrication and integration of "smart" micro- and nano-electro-mechanical systems (MEMS&NEMS) in which the smallest motile unit is the polymeric chai ...
The era of scanning probe microscopy (SPM) started twenty years ago. A cut gold cantilever with a glued diamond stylus served as the scanning probe. Within a few years the crystalline silicon (Si) became the – up to today – predominant SPM probe material. ...
Organic semiconductors are promising materials for future electronic and electroluminescence applications. A detailed understanding of organic layers and nano-sized crystals down to single molecules can address fundamental questions of contacting organic s ...
In this paper, we report on the integration technique and fabrication of a scanning probe interrogating the location of charges and their tracks inside quantum devices. Our unique approach is to pattern the charged sensor into a high topography micromechan ...
A novel method allowing rapid production of reliable composites with increased dielectric constant and high dielectric strength for dielectric elastomer actuators (DEA) is reported. The promising approach using composites of conductive particles and insula ...
