Germination et croissance de films minces de Pb(Zr, Ti)O3 sur silicium passivé et substrats métalliques
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Growth and properties of sputter in situ sputter deposited Pb(Z,Ti)O-3 (PZT) thin films have been studied on (111)-textured Pt electrodes as a function of seed layers of the type (TiO2)(x)(PbO)(y). The PZT process was run with a limited lead excess resulti ...
Three wet chemistry routes were used to synthesize Ba0.99Zr0.8Y0.2O3-delta (BZY20) and to avoid the drawbacks of the conventional mixed oxide route used for its preparation. Pure samples were prepared using the Matrix Trapping and Decomposition (MTD) and P ...
Triangular (111) and square-shaped (100) Pb(Zr,Ti)O-3 single crystallites with lateral dimensions down to 50 nm and thickness of 20 nm have been grown using lithography-modulated self-assembly in an in situ sputter process. Epitaxial (111)-oriented Pt on a ...
Pb(Zr-x, Ti1-x)O-3 (PZT) piezoelectric thin films are of major interest in MEMS technology for their ability to provide electro-mechanical coupling. In this work, the effective transverse piezoelectric coefficient e(31,f) of sol-gel processed films was inv ...
PZT (PbZrx Ti1-xO3) thin films have been locally grown by means of sol-gel deposition and local annealing on microhotplates. The microhotplates were based on a stress compensated Si3N4 /SiO2 membranes as structural elements and contained tantalum silicide ...
Relaxor ferroelectric thin films exhibit a drastic reduction in the dielectric constant and associated properties in the thin film form, even for thicknesses in the micron range, which are essentially infinity for the size effects typically investigated in ...
