Publication
An innovative technology for the realization of key elements of a microfabricated reduction unit is presented. In view of integrating the functions of gear, pinion and axle into one element, multilevel metal electroplating in a negative dry film resist mould (Riston) is used. Easier processing, inherent planarization for multilevel 3-D structures, vertical sidewalls and high thicknesses (20-50 mu m/level) are shown to be the main key features of dry films. To demonstrate the process feasibility, a gear and pinion set with upper and lower axle posts has been realized with four levels of nickel.
Peter Ryser, Thomas Maeder, Nathalie Sophie Adeline Serra, Pierre Lemaire
Peter Ryser, Thomas Maeder, Nathalie Sophie Adeline Serra, Pierre Lemaire