Pyroelectric thin-film sensor array

Pyroelectric thin-film point detectors and 1 x 12 arrays have been fabricated and characterized. They consist of sol-gel-deposited PZT thin-film elements on micromachined Si3N4/SiO2 membranes. The measured current and voltage response as a function of modulation frequency of a 1 x 12 array element is compared with finite-element calculations. Voltage responsivities of almost 3000 V W-1 in vacuum and 800 V W-1 in air have been achieved for 0.4 mm x 0.9 mm elements. Some point detectors have been completely packaged and correct operation in a movement detection system has been demonstrated.