Publication
A short overview is given on deposition and integration of PZT thin films on silicon for MEMS applications. The application principles are explained and the piezoelectric coefficients are compared with the ones of AlN and ZnO. The materials figure of merits are given for various applications and discussed. The coupling coefficient for ultrasonic applications is treated in more detail.
Kaitlin Marie Howell, Roman Welz
Paul Muralt, Mohammad Fazel Parsapour Kolour, Vladimir Pashchenko, Sylvain Ballandras