Êtes-vous un étudiant de l'EPFL à la recherche d'un projet de semestre?
Travaillez avec nous sur des projets en science des données et en visualisation, et déployez votre projet sous forme d'application sur Graph Search.
The fabrication and characterization of a microfabricated acoustic Lamb-wave device driven by a piezoelectric PZT (modified lead zirconate titanate Pb(Zr-x,Ti1-x)O-3) sol-gel thin film for use in mass-transport, mass-filtering and fluid-delivery systems are presented. Ultrasonic flexural plate waves (FPWs) at frequencies of the order of megahertz are generated and detected in a thin acoustic composite membrane by using two interdigitated transducers (IDTs) patterned on a 0.75 mu m thick piezoelectric ceramic PZT film, which provides high acoustic power for physical translation of fluid and microparticles. (C) 1998 Elsevier Science S.A.
Paul Muralt, Ramin Matloub Aghdam, Andrea Mazzalai, Nachiappan Chidambaram, Davide Balma