Ultrasonic flexural Lamb-wave actuators based on PZT thin film
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This paper describes fabrication and characterization results of piezoelectric micromachined ultrasonic transducers (pMUTs) based on 2-mu m-thick Pb(Zr0.53Ti0.47O3) (PZT) thin films. The applied structures are circular plates held at four bridges, thus par ...
The role of long-range strain interactions on domain wall dynamics is explored through macroscopic and local measurements of nonlinear behavior in mechanically clamped and released polycrystalline lead zirconate-titanate (PZT) films. Released films show a ...
Pb(Zr, Ti)O-3 (PZT) is an interesting material for bulk acoustic wave resonator applications due to its high electromechanical coupling constant, which would enable fabrication of large bandwidth frequency filters. The major challenge of the PZT solid solu ...
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A phenomenological approach is proposed describing both nonlinearity and frequency dispersion in dielectric and piezoelectric properties of lead zirconate titanate, Pb(Zr,Ti)O-3 (PZT), thin films and ceramics. The approach couples the frequency dependent r ...
Lead-free, potassium sodium niobate piezoelectric ceramics substituted with lithium (K0.5-x/2,Na0.5-x/2,Li-x)NbO3 or lithium and tantalum (K0.5-x/2,Na0.5-x/2,Li-x)(Nb1-y,Ta-y)O-3 have been synthesized by traditional solid state sintering. The compositions ...
Piezoelectric micromachined ultrasonic transducers comprising a 10 mu m thick Si device layer and a 14 pro thick piezoelectric PZT layer were investigated. The PZT films were deposited by a sol-gel technique. The transverse piezoelectric coefficient was me ...
The transverse piezoelectric coefficient (d(31)(star)) has been calculated for tetragonal barium titanate (BT) and lead titanate (PT) cut along nonpolar axes, over a range of temperatures, using the phenomenological Landau-Ginzburg-Devonshire theory. It is ...
