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Flexural-standing-wave elastic force motor using ZnO and PZT thin film on micromachined silicon membranes for wristwatch applications

Publications associées (37)

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This article has been retracted due to a breach in confidentiality. The confidential information has been redacted to protect the privacy of those involved. The authors have been invited to re-submit a modified version of their manuscript for publication. ...

SPRINGER2020

MEMS Generator Study for an Embedded Energy Harvesting System

Jasha Poliakine

This work has been triggered by an industrial project targeting the development of a novel regulation system for a mechanical watch. Mechanical watches have been known for over a century as one of the finest example of energy autonomous devices, embodying ...

EPFL2018

The continuing decrease of power requirements of electronic circuits offers the potential to deploy wireless systems as embedded sensors for cars or industrial tools, and implanted medical devices. Harvesting ambient vibrations by an appropriate energy har ...

EPFL2017

Which is the best thin film piezoelectric material?

Paul Muralt

The properties of piezoelectric thin films are reviewed for the case of the transverse piezoelectric effect using parallel plate electrodes. ...

Ieee2017

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A measurement setup for the detailed study of the transverse piezoelectric coefficient e(31,f) in the converse (actuator) mode was developed. It allows the assessment of the piezoelectric stress in thin films on silicon cantilevers and provides for a corre ...

Institute of Electrical and Electronics Engineers2015

Converse mode piezoelectric coefficient for lead zirconate titanate thin film with interdigitated electrode

Paul Muralt, Ramin Matloub Aghdam, Robin Nigon, Silviu Cosmin Sandu, Andrea Mazzalai, Nachiappan Chidambaram, Davide Balma

The use of interdigitated electrodes (IDEs) in conjunction with ferroelectric thin films shows many attractive features for piezoelectric MEMS applications. In this work, growth of {1 0 0}-textured lead zirconate titanate (PZT) thin films was achieved on i ...

Institute of Physics2015

Advanced sol-gel processing of PZT thin films for piezoelectric MEMS structures

Nachiappan Chidambaram

Micro-electro-mechanical systems (MEMS) technology is revolutionizing industrial and consumer products by replacing bulky devices by miniaturized versions that are suitable for portable applications as for instance in mobile phones. Besides small size, the ...

EPFL2014

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A five-layer stack of lead zirconate titanate (PZT) thin films with Pt electrodes was fabricated for potential applications in nanoactuator systems. The 1 mu m thick PZT films were deposited by a sol-gel technique, the platinum electrodes by sputtering. Th ...

Wiley-Blackwell2014

PZT thin films for MEMS devices

Andrea Mazzalai

The recent progress in synthesis and integration of highly piezoelectric lead-zirconate-titanate (PZT) thin films onto silicon substrates are paving the way for new, more efficient and faster devices in micro electro-mechanical systems (MEMS). In compariso ...

EPFL2014

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We present a complete wafer level microfabrication process for the production of unimorph MEMS energy harvesters based on thinned bulk piezoelectric ceramic, lead zirconate titanate (PZT), sheets. This process eliminates the need for individual bonding of ...

Elsevier2014