Processing and properties of screen-printed lead zirconate titanate piezoelectric thick films on electroded silicon
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Lead zirconate titanate (Pb(Zr1-xTix)O3 or PZT) ferroelectric ceramics have been widely used in transducers, actuators, and sensors, since they posses high dielectric and piezoelectric properties with a relatively high temperature of operation. Commerciall ...
Radio frequency (RF) filters based on bulk acoustic wave resonances in piezoelectric thin films have become indispensable components in mobile communications. The currently used material, AlN, exhibits many excellent properties for this purpose. However, i ...
Integration of new functional materials into silicon microsystems is a key factor to enable technology for a wide range of innovative MEMS devices. Piezoelectric materials are of primary interest for integrating sensing and actuation functions in MEMS due ...
It was noticed long time ago that the dielectric permittivity of BaTiO3 single crystals in the rhombohedral phase varies from observation to observation, but the microstructure mechanism behind this phenomenon remained unclear. We show that the variations ...
Infrared (IR) reflectivity spectra of nominally pure Pb(Zr1-xTix)O-3 ceramics with different Ti/Zr concentration (x = 0.42-0.58) were measured and evaluated, along with the time-domain terahertz transmittance spectra in the temperature range 10 K-900 K. Th ...
In contrast to usual assumptions, it is shown that even when ferroelastic domain walls are inactive or absent, the motion of ferroelectrically active interfaces in ferroelectric materials contributes, at subcoercive electric fields, not only to the polariz ...
Bulk PZT ceramics provide high electromechanical coupling (k) which is desirable for piezoelectric energy harvesters since the energy transformed from a mechanical agitation into an electrical output is proportional to k2 [1-2]. However, piezoelectric cant ...
Thin Film Bulk Acoustic Wave Resonators (TFBARs) had been developed a decade ago and since then were implemented extensively in mobile communications devices. The "heart" of a TFBAR consists of a piezoelectric film that operates as an acousto-electric tran ...
Piezoelectric materials are used in a wide range of applications, with lead zirconate titanate (PZT) ceramics being the dominant family of materials, due to high piezoelectric coefficients, dielectric permittivity and coupling factors. The high properties ...
