Processing and properties of screen-printed lead zirconate titanate piezoelectric thick films on electroded silicon
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Integration of new functional materials into silicon microsystems is a key factor to enable technology for a wide range of innovative MEMS devices. Piezoelectric materials are of primary interest for integrating sensing and actuation functions in MEMS due ...
Lead zirconate titanate (Pb(Zr1-xTix)O3 or PZT) ferroelectric ceramics have been widely used in transducers, actuators, and sensors, since they posses high dielectric and piezoelectric properties with a relatively high temperature of operation. Commerciall ...
Bulk PZT ceramics provide high electromechanical coupling (k) which is desirable for piezoelectric energy harvesters since the energy transformed from a mechanical agitation into an electrical output is proportional to k2 [1-2]. However, piezoelectric cant ...
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It was noticed long time ago that the dielectric permittivity of BaTiO3 single crystals in the rhombohedral phase varies from observation to observation, but the microstructure mechanism behind this phenomenon remained unclear. We show that the variations ...
Thin Film Bulk Acoustic Wave Resonators (TFBARs) had been developed a decade ago and since then were implemented extensively in mobile communications devices. The "heart" of a TFBAR consists of a piezoelectric film that operates as an acousto-electric tran ...
Infrared (IR) reflectivity spectra of nominally pure Pb(Zr1-xTix)O-3 ceramics with different Ti/Zr concentration (x = 0.42-0.58) were measured and evaluated, along with the time-domain terahertz transmittance spectra in the temperature range 10 K-900 K. Th ...
Piezoelectric materials are used in a wide range of applications, with lead zirconate titanate (PZT) ceramics being the dominant family of materials, due to high piezoelectric coefficients, dielectric permittivity and coupling factors. The high properties ...
