Dynamical Modelling and Position Control of Ultrasonic Piezoelectric Positioning Stage

The paper describes development of a feedback position controller for a new type of monolithic "hybrid" ultrasonic motor. The goal of the controller design was to demonstrate the main advantage of this piezoelectric motor – high speed and high accuracy at the same time. Tracking of 1 mm steps with 30 nm error in down to 100 ms has been achieved.