Unité
Laboratoire de systèmes nano-électromécaniques
LaboratoirePublications associées (609)
All-Dielectric Nanophotonic via Glass Fluid Instabilities
In this thesis work, we propose to exploit an innovative micro/nano-fabrication process, based on controlled fluid instabilities of a thin viscous film of chalcogenide glass. Amorphous selenium and arsenic triselenide were used in this thesis work, and com ...
EPFL2024Ultrahigh-quality-factor micro- and nanomechanical resonators using dissipation dilution
Tobias Kippenberg, Alberto Beccari, Nils Johan Engelsen
Mechanical resonators are widely used in sensors, transducers and optomechanical systems, where mechanical dissipation sets the ultimate limit to performance. Over the past 15 years, the quality factors in strained mechanical resonators have increased by f ...
Berlin2024Piezoelectric and elastic properties of Al0.60Sc0.40N thin films deposited on patterned metal electrodes
Luis Guillermo Villanueva Torrijo, Silvan Stettler, Marco Liffredo, Nan Xu, Federico Peretti
Sc-doped aluminum nitride (AlScN) allows for piezoelectric devices with large electromechanical coupling and the benefits increase with larger Sc doping in the film. However, with a larger Sc concentration, the process window narrows, and it is necessary t ...
2024Nanomechanical resonators with low dissipation for quantum optomechanics
Fields of technology as diverse as microwave filter construction, characterization of material interfaces with atomic precision, and detection of gravitational waves from astronomical sources employ mechanical resonators at their core. The utility of mecha ...
EPFL2023Integrated silicon photonic MEMS
Niels Quack, Hamed Sattari, Alain Yuji Takabayashi
Silicon photonics has emerged as a mature technology that is expected to play a key role in critical emerging applications, including very high data rate optical communications, distance sensing for autonomous vehicles, photonic-accelerated computing, and ...
SPRINGERNATURE2023Low-temperature processing of screen-printed piezoelectric KNbO3 with integration onto biodegradable paper substrates
Danick Briand, Luis Guillermo Villanueva Torrijo, Morgan Mc Kay Monroe
The development of fully solution-processed, biodegradable piezoelectrics is a critical step in the development of green electronics towards the worldwide reduction of harmful electronic waste. However, recent printing processes for piezoelectrics are hind ...
2023Resonant Transducers Consisting of Graphene Ribbons with Attached Proof Masses for NEMS Sensors
The unique mechanical and electrical properties of graphene make it an exciting material for nanoelectromechanical systems (NEMS). NEMS resonators with graphene springs facilitate studies of graphene's fundamental material characteristics and thus enable i ...
Washington2023