Lecture

High Resolution He Ion Microscopy

In course

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Description

This lecture discusses the ALIS He ion source, its optical properties, and its application in high resolution microscopy. It covers the design of the He ion source, the formation of the ion beam, and the imaging modes based on backscattered He ions, providing remarkable surface detail and material contrast.

Instructors (2)

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Official source

https://mediaspace.epfl.ch/media/0_0nhh77q2

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Ontological neighbourhood

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Chemical engineering

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Industrial and production engineering

Manufacturing engineering: Electron-beam technology

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