Scanning Electron Microscopy: Fundamentals and Applications

This lecture covers the fundamentals of scanning electron microscopy (SEM), including electron matter interaction, SEM setup, imaging techniques, challenges, and related techniques like energy dispersive X-ray spectroscopy (EDS) and electron backscatter diffraction (EBSD). The instructor explains the importance of fast electrons for achieving high resolution imaging, the contrast mechanisms in SEM, and the impact of beam damage, contamination, and charging. Various SEM signals such as secondary electrons (SE), backscattered electrons (BSE), and characteristic X-rays are discussed, along with techniques to improve signal-to-noise ratio and resolution. The lecture also delves into advanced topics like environmental SEM and 3D microscopy using focused ion beam (FIB) and EBSD for crystallographic analysis.