Lecture

Industrial Plasmas: Applications and Chemistry

Description

This lecture covers the applications and chemistry of industrial plasmas, including plasma medicine, breakdown phenomena, sheath and plasma etching in microelectronics, and plasma with insulating electrodes for large area displays and solar cells. It also discusses the challenges of plasma chemistry, different types of reactions in plasmas, and the difficulty of plasma chemistry compared to fusion. The lecture explores the concepts of gas-phase volume reactions, gas/surface reactions, and the transport of species to surfaces. Additionally, it delves into the example of a simple oxygen plasma and the concepts of elastic and inelastic collisions in plasmas.

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