Chemical Analysis: X-Ray Micro-Analysis XRMA

This lecture covers X-Ray Micro-Analysis (XRMA), a technique analyzing X-rays emitted by matter when excited by an electron beam. It compares XRMA in electron microscopes (EM) with specific spectrometers like EMPA, discussing sensibility, accuracy, and interaction between electrons and matter. The lecture explains the interaction volume, primary emission, X-Ray fluorescence, and matter excitation-relaxation. It details the analysis of thick and thin materials, matrix effects, and correction methods for quantitative analysis. The XRMA spectrometers, operating modes, and sources of errors are also discussed, along with qualitative and quantitative analysis methods for thick and thin samples.

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