Thermo-mechanical Micro-actuator: Case Study

This lecture covers the design and fabrication process of a bi-morph micro-actuator, explaining the concept of thermo-mechanical actuation using thin films with different thermal expansion coefficients. It details the microfabrication sequence involving steps like wafer preparation, wet oxidation, Cr deposition, photolithography for patterning heaters and beams, SiO2 and silicon etching. The lecture also discusses the thermo-mechanical characterization of the actuator through DC and AC current applications, showcasing cantilever bending and glowing of the Cr heater at high voltages.