Lecture

Wet Etching: Glass and Silicon

Description

This lecture covers the wet etching process of glass and silicon using HF-based solutions. It explains the mechanism of HF etching, the addition of NH4F to enhance etching, and the impact of glass composition on etch rates. The lecture also details cleanroom processes for HF and buffered HF (BHF) etchants, including Pyrex etching and mask underetching.

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